Edwards XDS5, XDS 5, XDS-5
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Edwards
Highland Scientific - Last Updated: 04/02/2014
Copyright 2004 Highland Scientific. All Rights Reserved
Edwards QDP80, QDP 80 Edwards GV80, GV 80, GV-80 Edwards XDS5, XDS 5, XDS-5 Edwards XDS35i, XDS 35i, XDS-35i Edwards XDS35i, XDS 35i, XDS-35i
Rotary
Pumps
Combined
Pump Sets
Booster
Pumps
Turbo
Pumps
Edwards QDP40
Four-stage, positive displacement rotary dry pump.
Ideal for the corrosive enviroment of semiconductor processing. Applications ranging from light duty loadlock and sputtering to more demanding processes like plasma, etch, PECVD etc.
Edwards QDP80
Four-stage, positive displacement rotary dry pump.

Pumping speed: 91.5CMH
Ultimate Vacuum: 3x10-2 m/bar
Inlet flange: ISO63
Outlet flange: NW40
Dry Pump

Pumping speed: 80CMH
Ultimate Vacuum: 3x10-2 m/bar
Inlet flange: ISO63 Bolted
Outlet flange: NW40
Edwards IQDP80
Edwards GV80
Dry Pump

Pumping speed: 92CMH
Ultimate Vacuum: 0.1 m/bar
Inlet flange: ISO40
Outlet flange: KF40
Edwards XDS35i
Scroll Pump

Pumping speed: 43CMH
Ultimate Vaccum: 1x10-2 m/bar
Inlet flange: KF40
Outlet flange: KF25
Edwards XDS5
Scroll Pump

Pumping speed: 4.8 CMH
Ultimate Vaccum: 7x10-2 m/bar
Inlet flange: KF25
Outlet flange: KF25
Dry Pumps